PRODUCT
ETSA High precision air flotation platform
The air flotation platform overcomes the shortcomings of traditional mechanical positioning platforms, such as short stroke, large response lag, and frictional resistance, and achieves high-precision and high-speed positioning functions for long stroke. It plays an irreplaceable role in semiconductor lithography equipment, precision measurement, and biomedical fields. High repeat positioning accuracy, small pitch and yaw angles, and the use of the same material for the motion table and guide rail will not cause the common "lock up" phenomenon of the air flotation table in working conditions with large temperature changes. By using static pressure air flotation to isolate the contact between mechanical motion pairs, the platform mechanism's motion accuracy, surface smoothness, small deviations (pitch, yaw, etc.), stable performance, no mechanical losses, and "zero" friction can be improved, making it suitable for nanoscale applications.
Typical applications
• Precision machining
• Precision measurement
• Microelectronics manufacturing industry
• Lithography machine platform
• Semiconductor processing industry
• Scanning
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Sanying MotionControl Instruments Ltd. is a company specializing in the development of precision motion control technology and products, and is committed to providing systematic technical solutions and integration for scientific research, innovative research and development, and manufacturing of high-end instruments and equipment. A professional manufacturer that meets the market's demand for precision motion control technology.
Building 8, 38 Fuyuan Road, Wuqing Development Area, Tianjin, P.R.China
Customer service hotline：022-29516025
Email：sales@symc-tec.com