PRODUCT
ASO-X350Y500 High precision gantry dual drive two-dimensional air flotation platform
The main structural material of the ASO series coplanar air floating structure platform is marble, which has a small expansion coefficient and is more conducive to ensuring the overall accuracy of the system. Both axes are driven by ironless linear motors, and the motion synchronization of the dual drive axes is ensured through the internal cross decoupling control algorithm of the ACS controller. The feedback system can adopt incremental, sin/cos, and absolute feedback methods according to actual needs, which can be better applied to various situations. Air floating guide rails have inherent averaging effects, which can greatly improve performance and effectively ensure high repeatability, pitch and yaw, and straightness indicators.
Characteristic
- All axes use vacuum preloading
- Adopting a coplanar air flotation structure
- High speed, high response setting time
- Y-axis dual air guide rail integrated grinding and forming
Typical applications
ASO gantry air flotation is highly suitable for high-precision applications, precision scanning, and applications in semiconductor or flat panel display manufacturing. Due to its frictionless motion and no particle formation, the ASO air flotation platform is highly suitable for cleanroom applications.
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Sanying MotionControl Instruments Ltd. is a company specializing in the development of precision motion control technology and products, and is committed to providing systematic technical solutions and integration for scientific research, innovative research and development, and manufacturing of high-end instruments and equipment. A professional manufacturer that meets the market's demand for precision motion control technology.
Building 8, 38 Fuyuan Road, Wuqing Development Area, Tianjin, P.R.China
Customer service hotline：022-29516025
Email：sales@symc-tec.com