三英精控(天津)仪器设备有限公司

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EVSP-45SPG

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EVSP-45SPG electric control vertical stage

 

1. The main part is made of aging treated high-strength aviation aluminum to ensure long-term stability.

2. It adopts special mechanical structure and multiple sets of ultra precision cross roller guides, with ultra-high precision track control.

3. Matching with the indium steel grating system with ultra-low expansion coefficient.

4. It adopts precision grinding, low friction ball screw and 5-phase stepping motor direct drive, which can provide super smooth movement even under high load. Features: with the best accuracy and repeatability, excellent dynamic performance.

 

Application:

semiconductor wafer test

automatic equipment calibration

sensor test and detection

 

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Model

EVSP-45SPG

Travel ( mm )

45

Screw Lead ( mm )

2

Main Material

Aviation aluminum

Surface Treatment

Anodic oxidation

Guide Rail

Ultra precision cross roller guide

Maximum Speed ( mm/s )

10

Resolution (μm )

0.1(grating ruler)

Double Direction Repeated Positioning Accuracy ( μm )

±0.3

Straightness and flatness (μ m)

±2

Pendulum(arcsec)

±10

Drive Motor

5 Phase stepping motor

Step Angle

0.36º

Central Load ( kg )

8

Feedback Signal

TTL

Accuracy ( μm )

±1

Control Method

Closed loop

 

EVSP-45SPG

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Sanying MotionControl Instruments Ltd. is a company specializing in the development of precision motion control technology and products, and is committed to providing systematic technical solutions and integration for scientific research, innovative research and development, and manufacturing of high-end instruments and equipment. A professional manufacturer that meets the market's demand for precision motion control technology.

Online customer service
Customer service hotline
022-29516025
Service time:
8:00 - 18:00

Building 8, 38 Fuyuan Road, Wuqing Development Area, Tianjin, P.R.China

Customer service hotline:022-29516025