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  • The product name: Precision Actuator
  • Product model: MPA-20
  • Views : 27

The MPA-20 linear actuator is designed for ultra high vacuum (10-9 mbar) environments and limited space applications.

Typical applications include actuation of manual drive stages and mirror mounts. It utilizes a 2-phase stepper motor and two hermetically sealed mechanical limit switches. The MPA-20 is is compatible with the MMC-200 controller.


  • Travel range of 12mm
  • Gear reduction of 4:1
  • Load capacity up to 10 kg
  • Force, max: 100N
  • Preloaded spline for low backlash
  • Hermetically sealed limit switches, UHV compatible
  • Integrated thermal couple
  • Other motor/gear options available upon request


Travel Dependent Specifications

Travel range [mm]



Motor Compatibility


Motor option

Stepper Motor, SM-005


Motor/Feedback Dependent Specifcations


Encoder option

None (Open Loop)

Resolution, typical [µm]


Repeatability, bi-directional [µm]

± 1

Repeatability, uni-directional [µm]


Accuracy [µm]



Load Characteristics



Fx [N]

Fy [N]

Fz [N]

Mx [N·m]

My [N·m]

Mz [N·m]

Load, max








Product Name

Precision Actuator 

Product Model


Delivery Term


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