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  • The product name: Piezo Positioner Cross Stage
  • Product model: PPX-32
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The PPX-32 is a low profile, long travel, integrated XY stage with a height of only 14 mm. Four pre-loaded ball slides guarantee smooth and stable motion for loads up to 10 N. It utilizes a multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 1 N). The PPX-32 is available in open loop or with a linear encoder Closed-loop resolution of 1 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) are available. The PPX-32 is compatible with the MMC-100 and MMC-110 controllers

 

  • Travel: 18 x 18 mm
  • Load, max: 1 kg
  • Speed, max: 2 mm/s
  • Resolution, typical: 1 nm
  • Repeatability, bi-directional: ± 50 nm
  • Repeatability, uni-directional: 50 nm
  • Encoder Options: Analog, Digital

 

Travel Dependent Specifications

 

Travel range [mm]

18 x 18

Straightness/Flatness [µm]

± 2.5

Pitch [µrad]

± 200

Yaw [µrad]

± 100

Weight [g]

40

 

Motor Compatibility

 

Motor option

Piezo Motor, PM-002

Speed, max [mm/s]

2 (MMC-100), 5(MMC-110)

 

Motor/Feedback Dependent Specifcations

 

Encoder option

None (open loop)

Analog (1 Vpp)

Digital (RS-422)

Resolution, typical [nm]

1

10

1

Repeatability, bi-directional [nm]

n/a

± 50

± 50

Repeatability, uni-directional [nm]

n/a

50

50

Accuracy [µm]

-

± 1

± 1

 

Load Characteristics

 

Orientation

Fx [N]

Fy [N]

Fz [N]

Mx [N·m]

My [N·m]

Mz [N·m]

Load, max

1

1

10

0.6

0.6

0.6

 

Product Name

Piezo Positioner Cross Stage

Product Model

 PPX-32

Delivery Term

 

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