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  • The product name: Nano-positioning Stage
  • Product model: NS-Z100-01
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Nanometer displacement system has come into more and more extensive use, such as AFM (atomic force microscope), precision optical equipment, semiconductor device, and various high-tech industries. Nanometer displacement system is capable of generating and measuring displacement superior to nanometer (nm) and the entire system consists of three parts, i.e. nanometer displacement platform, controller and control software.

As a mechanical device, nanometer positioning platform is equipped with one or several piezoelectric ceramics internally which generate monaxial or multiaxial motion. The nanometer positioning platform designed and manufactured by Sanying applies flexible hinge which connects the motion unit with the fixed base. The nanometer positioning platform is equipped with a built-in high-precision sensor.    When under closed-loop control, our sensor technology may bring about resolution ratio in nanometers and sub-nanometers when the linearity is guaranteed.

pms2pecoent, semiconductor device, and various high-tech industries. Nanometer displacement system is capable of generating and measuring displacement sup, controller and control srm designed and manufactured by Sanying applies flexible hinge which connects the motion unit with the fixed base. The nanometer positioning platform is equipped with a built-in high-precision sensor.    When under closed-loop control, our sensor technology may bring about resolution ratio in nanometers and sub-nanometers when the linearity is guaranteed.

Model

NS-Z100-01

Motion axis

Z

Sensor type

Capacitive

Closed-loop travel ( μm )

100

Closed-loop resolution ( nm )

0.5

Linearity ( % )

0.05

Unloaded resonant frequency ( Hz )

1100

Connector type

D-sub15

Material of stage

Aluminium Alloy

Maximum load ( kg )

2

Stage size ( mm )

Φ65.5 x 52.5

 

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If you are interested in our products ,please send us inquiry by following contact :

Email :   qchen@symc-tec.com

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