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  • The product name: Nano-positioning Stage
  • Product model: NS-Z100-01
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Nanometer displacement system has come into more and more extensive use, such as AFM (atomic force microscope), precision optical equipment, semiconductor device, and various high-tech industries. Nanometer displacement system is capable of generating and measuring displacement superior to nanometer (nm) and the entire system consists of three parts, i.e. nanometer displacement platform, controller and control software.

As a mechanical device, nanometer positioning platform is equipped with one or several piezoelectric ceramics internally which generate monaxial or multiaxial motion. The nanometer positioning platform designed and manufactured by Sanying applies flexible hinge which connects the motion unit with the fixed base. The nanometer positioning platform is equipped with a built-in high-precision sensor.    When under closed-loop control, our sensor technology may bring about resolution ratio in nanometers and sub-nanometers when the linearity is guaranteed.

pms2pecoent, semiconductor device, and various high-tech industries. Nanometer displacement system is capable of generating and measuring displacement sup, controller and control srm designed and manufactured by Sanying applies flexible hinge which connects the motion unit with the fixed base. The nanometer positioning platform is equipped with a built-in high-precision sensor.    When under closed-loop control, our sensor technology may bring about resolution ratio in nanometers and sub-nanometers when the linearity is guaranteed.

Model

NS-Z100-01

Axis of Motion

Z

Sensor Type

电容式

Closed-loop Travel

100μm

Closed-loop Resolution

0.4nm

Linearity

0.02%

Unloaded resonant frequency

1120Hz

Diameter

M-32

Material of Stage

Aluminum alloy

Rigidity

3.4N/μm

Size

Φ65×50.7mm

 

 

NS-Z100-01 Size diagram

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If you are interested in our products ,pls send us inquiry by following contact :

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