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  • The product name: Nano-positioning Stsge
  • Product model: NS-RB4-01
  • Views : 30

Nanometer displacement system has come into more and more extensive use, such as AFM (atomic force microscope), precision optical equipment, semiconductor device, and various high-tech industries. Nanometer displacement system is capable of generating and measuring displacement superior to nanometer (nm) and the entire system consists of three parts, i.e. nanometer displacement platform, controller and control software.

As a mechanical device, nanometer positioning platform is equipped with one or several piezoelectric ceramics internally which generate monaxial or multiaxial motion. The nanometer positioning platform designed and manufactured by Sanying applies flexible hinge which connects the motion unit with the fixed base. The nanometer positioning platform is equipped with a built-in high-precision sensor.    When under closed-loop control, our sensor technology may bring about resolution ratio in nanometers and sub-nanometers when the linearity is guaranteed.

The controller supplies power to the nanometer positioning platform. When under closed-loop control, the controller in the nanometer positioning platform provides displacement data for the controller. Besides, the controller processes the displacement data and corrects the output voltage signals periodically to make sure the displacement data and the instruction data are consistent.



Motion axis


Sensor type


Closed-loop travel ( μm )


Closed-loop resolution ( nm )


Linearity ( % )


loaded resonant frequency ( Hz )


Unloaded resonant frequency ( Hz )


Connector type


Material of stage

Aluminium Alloy

Maximum load ( kg )

3 Inch Mirror

Stage size ( mm )

52 x 52 x 60


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