三英精控(天津)仪器设备有限公司

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EVSP-45SPG

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Description
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Product introduction

•The main body is made of high-strength aviation aluminum after aging treatment to ensure long-term stability;

•Special mechanical structure is adopted to coordinate with multiple the sets of super precision cross roller Guide rail to ensure ultra-high precision trajectory control;

•Supporting high-precision optical encoder system;

•It adopts precision grinding and low friction ball screw with 5-phase stepper power by directly drive in order to provide super smooth movement even under heavy load.

Features

high precision, high repeatability,excellent dynamic performance.

Application

Semiconductor wafer testing, Automatic equipment calibration,

Sensor testing and testing

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Model

EVSP-45SPG

Travel(mm)

45

Main Material

Aviation Aluminum

Surface Treatment

Black Anodized

Guide Rail

High Precision Cross Roller Guide

Maximum Speed(mm/s)

10

Resolution(μm)

0.1(Optical Encoder)

Bidirectional Repeated Positioning Accuracy(μm)

±0.3

Straightness,Flatness(μm)

±2

Yaw(arcsec)

±10

Drive Motor

5 Phase Stepper Motor

Stepper Angle

0.36°

Central Loading(kg)

8

Feedback Signal

TTL

Accuracy(μm)

±1

Control Method

Closed-Loop

 

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Sanying MotionControl Instruments Ltd. is a company specializing in the development of precision motion control technology and products, and is committed to providing systematic technical solutions and integration for scientific research, innovative research and development, and manufacturing of high-end instruments and equipment. A professional manufacturer that meets the market's demand for precision motion control technology.

Online customer service
Customer service hotline
022-29516025
Service time:
8:00 - 18:00

Building C21, Venture Capital Headquarters, Wuqing Development Zone, Tianjin

Customer service hotline:022-29516025